- Title
- A 2-DOF wideband electrostatic transducer for energy harvesting and implantable applications
- Creator
- Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R.
- Relation
- 8th IEEE Conference on SENSORS (SENSORS 2009). Proceedings of the IEEE SENSORS 2009 Conference (Christchurch, New Zealand 25-28 October, 2009) p. 1542-1545
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2009.5398476
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2009
- Description
- This paper reports the modeling, fabrication and characterization of a SOI-based electro-mechanical transducer used for energy harvesting. The electrostatic transducer couples the ultrasonic energy with the vibration of a seismic mass, converting ultrasonic mechanical energy into electrical energy by means of polarized movable capacitor with comb structures. To extract ambient kinetic energy with arbitrary motion directions, this paper introduces a novel 2D resonator with resonance frequencies of 38520 Hz and 38725 Hz. Working in diagonal direction, the -10 dB bandwidth is 302 Hz, twice wider than 1D resonator devices. The measured dynamic frequency response shows that a maximum peak-to-peak output voltage of 10 mV can be obtained through a 1 M ohm resistive load, and the harvested power is calculated as 0.1 nW. Potential applications for powering battery-free implanted biomedical devices are also discussed in this paper.
- Subject
- electrostatic devices; energy harvesting; frequency response; prosthetics; ultrasonic transducers
- Identifier
- http://hdl.handle.net/1959.13/918720
- Identifier
- uon:8689
- Identifier
- ISBN:9781424453351
- Rights
- Copyright © 2009 IEEE. Reprinted from the Proceedings of the IEEE SENSORS 2009 Conference. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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